A high throughput study of both compositionally graded and homogeneous Fe–Pt thin films

Compositionally graded Fe–Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe which piece Pt is asymmetrically positioned. Energy dispersive X-ray analysis was used to map the variation in film composition across substrate, as function size piece. A scanning polar Magneto-Optical-Kerr-Effect system probe influence and post-deposition annealing conditions (temperature time) coercivity. In this way, maximum coercivity achievable for could be established high throughput fashion. The evolution with correlated formation L10 FePt changes its lattice parameters, determined diffraction. High mapping then carried out homogeneous different compositions treated conditions. This study serves step towards integration coercive into collectively fabricated devices.